OLED掩膜版(Mask)清洗厂房洁净空调设计分析

Design and Analysis of Cleanroom HVAC for OLED Mask Cleaning Building

以OLED掩膜版清洗厂房为例说明甲类洁净厂房的洁净空调设计要点,并结合实际运行情况提出改善方向。

This paper takes the OLED mask cleaning building as an example to illustrate the key points of HVAC design of fire hazard class A cleanroom,and puts forward the improvement direction based on the actual operation.