刚柔耦合微定位平台的设计与分析

Design and analysis of a rigid-flexible coupling micropositioning platform

设计了一种采用压电陶瓷驱动的3自由度刚柔耦合微定位平台,利用柔性铰链机构及自锁原理在保证装置定位精度的同时提高了微定位平台的承载能力.首先,对该平台的结构进行了设计,分析其运动及自锁原理;然后采用ANSYS对微定位平台进行了性能分析,结果表明,该微定位平台在y方向变形为28.8μm/100 N,z方向的变形为0.205μm/100 N;模态分析中,xy向驱动板和z向驱动板一阶固有频率较高,具有比较理想的动力学特性,能够用于加工过程中承载力变化较大的情况.

A 3-DOF rigid-flexible coupled micro-positioning platform based on piezoelectric drive is designed.A bridge amplification mechanism is used to expand the output range of the device.The flexible hinge mechanism and self-locking principle are used to improve the output rigidity of the micro-positioning platform while ensuring the output accuracy of the device.Firstly,the platform structure is designed,and its driving and self-locking principles are analyzed.Then ANSYS is used to analyze the performance of the micro-positioning platform.The analysis results show that the micro-positioning platform deforms to 28.8μm/100N in the y directions and 0.205μm/100 N in the z direction.In the modal analysis,the xydirection drive plate and the z-direction drive plate have higher first-order natural frequencies,and have relatively ideal dynamic characteristics,and can be used in situations where the bearing capacity changes greatly during processing.