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高效气囊抛光中频误差控制路径规划 被引量:1

Path Planning of Mid-spatial Frequency Control in High Efficiency Bonnet Polishing
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摘要 为了满足高效气囊抛光缩短加工时间、提高加工精度并改善光学表面的纹理的目标,本文提出了一种基于光学元件初始面形来调整光栅间距的自适分区应光栅路径。实验结果表明,使用自适应分区光栅路径进行迭代抛光,可以有效提高光学元件表面质量,在X方向引入了0.14 mm-1的中频误差而在Y方向没有引入新的中频误差。 In order to shorten the processing time,improve the machining accuracy and improve the texture of the optical surface in high efficiency bonnet polishing,a partition adaptive grating path based on the initial shape of optical elements is proposed in this paper.The experimental results show that the surface quality of optical elements can be effectively improved by using the adaptive grating path.The mid-spatial frequency error of 0.14 mm-1 is generated in the X direction,but no new mid-spatial frequency error is generated in the Y direction.
作者 姜涛 Tao Jiang(College of Mechanical and Energy Engineering Jimei University,Xiamen 361021,China)
出处 《广东化工》 CAS 2020年第19期58-60,共3页 Guangdong Chemical Industry
基金 集美大学国家基金培育计划项目(ZP2020048)。
关键词 高效抛光 气囊抛光 中频误差 路径规划 high efficiency polishing bonnet polishing mid-spatial frequency path planning
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