超声作用下SiC陶瓷表面振动强度分布模拟

Simulation of Vibration Intensity Distribution of SiC Ceramic Surface Under Ultrasonic

采用ANSYS有限元模拟软件进行超声作用下SiC陶瓷的瞬态分析及谐响应分析。利用激光测振仪对超声作用下SiC陶瓷表面的振动强度和振动分布进行了研究。结果表明:施加超声后SiC陶瓷表面的超声振动沿超声工具头向四周扩散,SiC陶瓷表面的振动强度分布迅速变化,振动首先到达距工具头较近的三个边界,随后到达较远的边界,随着超声时间的延长,SiC陶瓷表面的振动达到谐响应稳定状态。随着超声振幅的增加,SiC陶瓷表面的振动强度增加,当超声振幅为4μm时在一周期内SiC陶瓷表面振动强度幅值可达18.6μm,当超声振幅为8μm时振动强度幅值为36.6μm。施加超声后,SiC陶瓷表面振动强度在水平中心线上,沿超声工具头向右边界逐渐增大,并沿水平中心线向两边界逐渐增大;在超声的作用下,SiC陶瓷表面超声工具头圆心位置处的振动为正弦波动,沿远离工具头的方向,振动不再是正弦分布,但也呈现出正弦波动的部分特性。研究超声作用下SiC陶瓷表面的振动分布特性及传播规律,有助于掌握超声波辅助钎焊SiC陶瓷的连接方法与机理,使得超声波技术在SiC陶瓷钎焊工业中的应用成为可能。

The transient analysis and harmonic response analysis of SiC ceramics under ultrasonic action were performed using ANSYS finite element simulation software.The vibration intensity and vibration distribution of SiC ceramic surface under ultrasonic action were investaged by the laser vibrometer.The results show that the ultrasonic vibration of the SiC ceramic surface spreads around the ultrasonic tool head after the application of ultrasonic.The vibration intensity distribution of the SiC ceramic surface changes rapidly.The vibration first reaches the three boundaries closer to the ultrasonic tool head,and then reaches the farther boundary.With the increase of ultrasonic time,the vibration of SiC ceramics reaches a steady state of harmonic response.The vibration intensity of SiC ceramic surface increases with the increase of ultrasonic amplitude.When the ultrasonic amplitude is 4μm,the amplitude of the ceramic surface vibration intensity can reach 18.6μm in one period.When the ultrasonic amplitude is 8μm,the vibration intensity amplitude is 36.6μm.After the application of ultrasonic,the vibration intensity of the SiC ceramic surface is on the horizontal centerline,which gradually increases along the right edge of the ultrasonic tool head,and gradually increases along the horizontal centerline toward the two boundaries.Under the action of ultrasonic,the vibration at the center of the ultrasonic tool head on the ceramic surface is sinusoidal.In the direction away from the tool head,the vibration is no longer sinusoidal,but it also shows some characteristics of sinusoidal fluctuation.The vibration distribution characteristics and propagation law of SiC ceramic surface under the action of ultrasonic were analyzed.It can help to grasp the bonding method and mechanism of ultrasonic-assisted brazing of SiC ceramics,which makes the application of ultrasonic technology in SiC ceramic brazing possible.