激光位移传感器设计与标定测试

Design and calibration test of laser displacement sensor

为了降低激光位移传感器试制成本,并且更加方便地进行线性度测试,研发了一种激光位移传感器。使用ZEMAX软件对光学系统进行优化设计,得到合适的收光镜头,再选取光电元件,成功研制了一种工作距离为100 mm,量程为±25 mm,线性度为±0. 28%,分辨率为20μm的激光位移传感器。该传感器具有测量范围宽,线性度好,分辨率高的特点,满足了在工业场景中对精密测量的使用要求。

To reduce the cost of laser displacement sensor trial production and carry out linearity measurement more conveniently,a laser displacement sensor is developed. ZEMAX software is used to optimize the design of the optical system,an appropriate optical lens is obtained,and then select photoelectric elements,a laser displacement sensor with working distance of 100 mm,measuring range of ± 25 mm,linearity of ± 0. 28 % and resolution of20 μm is successfully developed. The sensor has the characteristics of wide measuring range,good linearity and high resolution,which meets the application requirements of precise measurement in industrial scenes.