CCD双轴自准直仪的长距离测量实现

The Long-distance Measurement Realization of Matrix CCD Dual-axis Autocollimator

本文阐述了一种基于面阵CCD的双轴自准直仪的长距离测量方法。其间利用上位机对十字叉丝的图像处理结果与德国ELCOMAT 3000测角真值进行比较,验证光学系统的测角精度,并采用灰度重心法与最小二乘法相结合的算法,使定位精度达到亚像素级。分析结果显示,在±10″内测量精度优于0.2″,在±100″内测量精度优于3″。试验结果表明,该方法具有较高的实用价值。

This paper described a long-distance measurement method of a dual-axis autocollimator based on an ma⁃trix CCD.In the meantime,the image processing results of the cross hairs by the upper computer were compared with the true value of the German ELCOMAT 3000 angle measurement to verify the angle measurement accuracy of the op⁃tical system,and an algorithm combining gray barycentric method and least square method was used to make the posi⁃tioning accuracy reach the sub-pixel level.The analysis results show that the measurement accuracy is better than 0.2"within±10",and the measurement accuracy is better than 3"within±100".The test results show that this meth⁃od has high practical value.