真空管路中压力波动的模拟

Simulation of pressure fluctuation in vacuum tubes

为了研究真空系统中压力波动的规律,以与真空压力传感器连接的气管为研究对象,建立二维轴对称模型,设定适当的边界条件,数值分析管路中压力波动的特性。结果表明,真空管路中压力波动出现在充气的初始时刻,峰值大于充气压力,对压力传感器造成冲击。压力波动随着气管长度的增加而衰减,可通过增加气管长度减弱或消除压力波动,但同时会延长压力降低至目标真空度的时间。应选择适当长度的气管,在抑制压力波动和真空压力滞后之间保持平衡。对进一步研究真空系统的压力波动、优化真空系统组成具有参考意义。

In order to study the law of pressure fluctuation in vacuum system,a two-dimensional axisymmetric model of the air tube connected with the vacuum pressure sensor in vacuum system is established,the appropriate boundary conditions are proposed,and the pressure fluctuation in the tube is calculated.The pressure fluctuation occurs at the initial time of inflation,and its peak value is higher than the inflation pressure and will impact the pressure sensor.The pressure fluctuation decreases with the increase of the tube’s length.Increasing the length of tube can reduce or eliminate the pressure fluctuation,meanwhile it will prolong the time of reducing the pressure to the target vacuum pressure at the same time.A proper length of tube should be selected to keep balance between pressure fluctuation suppression and vacuum pressure lag.This paper provides a technical reference for further study of pressure fluctuation and optimization of vacuum system composition.