氧化铝陶瓷无线无源加速度计的仿真与分析

Simulation and Analysis of Wireless Passive Accelerometer Based on Alumina Ceramic

高温环境下振动参数的实时监测对航空发动机、燃气轮机等大型装备的正常运行至关重要。针对传统加速度计存在测量温度不高、测量电路失效等问题,提出了一种以氧化铝陶瓷为敏感材料、以无线非接触测量原理为特征信号传输方法的耐高温电容式加速度计。依据结构力学模型设计传感器敏感结构的尺寸,利用Ansys仿真软件对敏感结构的静力学、动力学与热力学性能进行分析,结果表明,该结构能够在250 gn载荷范围内正常工作,且具有较强的抗干扰能力。在25℃~600℃范围内,传感器灵敏度随温度呈增大趋势,其值由34.572 kHz/gn变化为38.112 kHz/gn,变化幅度较小,为高温环境下振动参数的稳定测量提供了一种可行的方案。

Real-time monitoring of vibration in high-temperature environment is critical to the normal operation of large-scale equipment such as aero-engines and gas turbines.In order to solve the problems of low measurement temperature and measurement circuit failure in traditional accelerometers,a high-temperature resistant capacitive accelerometer that uses alumina ceramic as sensitive material and wireless non-contact measurement principle as the characteristic signal transmission method is proposed.The size of sensitive structure is designed according to the structural mechanics model.Ansys is used to analyze the static,dynamic and thermodynamic properties of the sensitive structure.The simulation results show the sensitive structure can work within the 250 gn and has strong anti-interference capability.In addition,the sensitivity of sensor increases with temperature within 600℃,from 34.572 kHz/℃to 38.112 kHz/℃,and the change is small,which provides a feasible solution for the stable measurement of vibration under high-temperature environment.