基于压电驱动的全固态可变焦微透镜结构设计与仿真研究

Structural Design and Simulation Research of All-Solid-State Zoom Microlens Based on Piezoelectric Driving

传统的光学透镜通过音圈马达(VCM)驱动,焦距不可调且结构复杂、存在电磁干扰;当前研究的热点是液体微透镜,可通过改变微透镜表面的曲率半径实现变焦,但存在漏液、重力效应等问题。本文设计了一种基于压电驱动的固体可变焦微透镜,通过采用压电陶瓷-玻璃薄膜-压电陶瓷三层式结构的压电驱动器间接驱动柔性微透镜介质PDMS(聚二甲基硅氧烷)薄膜,使其产生相应的弯曲来达到调焦的目的,具有体积小、可变焦范围广、无漏液和重力效应、无电磁干扰等优势引起了人们的广泛关注。利用COMSOL仿真软件研究了不同压电驱动结构对微透镜性能的影响,确定了微透镜各组件的最佳结构参数,探讨了不同驱动电压下微透镜的形变量和焦距,为高可靠微透镜的设计提供了新颖的解决方案。

The traditional optical lens is driven by a voice coil motor(VCM).The focal length is not adjustable,the structure is complicated,and there is magnetic interference.The hotspot of current research is liquid microlens,it can be achieved by changing the curvature radius of the microlens surface,but there are problems such as liquid leakage and gravity effects.This paper designs a solid zoom microlens based on piezoelectric driving.The flexible microlens medium PDMS(polydimethylsiloxane)is driven indirectly by a piezoelectric actuator using a piezoelectric ceramic-glass film-piezoceramic three-layer structure,which causes it to bend correspondingly to achieve the purpose of focusing.It has the advantages of small size,wide zoom range,no liquid leakage and gravity effects,and no magnetic interference.The COMSOL simulation software is used to study the influence of different piezoelectric driving structures on the performance of microlenses,and the optimal structural parameters of microlens components are determined.The deformation and focal length of microlenses under different driving voltages are discussed.It provides a novel solution for the design of high reliability microlens.