衬底热导对Mn-Co-Ni-O薄膜热敏红外探测器性能的影响

Influence of Substrate Thermal Conductivity on the Performance of Mn-Co-Ni-O Thin Film Thermal Detector

研究了用Mn-Co-Ni-O薄膜材料制备的热敏红外探测器件,并主要通过调控衬底热导改进了器件性能。对于较薄的探测元,研究了具有微桥结构的红外器件。结果表明,该器件的响应率比非微桥器件高80%左右,探测率高44%左右。这主要是因为其独特的结构形式降低了器件热导,且对光的全反射效应提高了探测元对光的吸收率。对于较厚的探测元,在衬底上增加了抛光的散热铜片,使器件衬底的导热系数提高了47%左右,但响应电压降低了50%左右。因此需要合理选择散热铜片,以获得合适的时间常数和响应率。

The thermal infrared detector based on Mn-Co-Ni-O thin film is studied.The properties of the detector can be improved by adjusting the thermal conductivity of the substrate.For the thinner detection unit,a new kind of micro-bridge infrared detector is studied.It is find that the responsivity is about 80%higher than that of the non-microbridge device,and the detection rate is about 44%higher.This is mainly because its unique structural form reduces the thermal conductivity of the device,and the total reflection effect of light improves the light absorption rate of the detection element.For the thicker detection unit,a polished copper sheet is added to the substrate,which increases the thermal conductivity of the substrate by about 47%,but the response voltage is reduced by about 50%.Therefore,a reasonable choice of heat dissipation copper is required to obtain a suitable time constant and responsivity.