基于压强自适应补偿高精度氧气传感器的研究

Research on High Precision Oxygen Sensor Based on Adaptive Compensation of Pressure

在煤矿现场,压强的突变会影响氧浓度的测量,出现测量值较大偏差或无效数据的情况。通过实验室测试和模拟测试获取不同压强下的氧浓度值,找出氧浓度监测值与压强值的函数关系;对敏感元件结构体进行研究,提出了压强自适应补偿方法,从而消除压强变化对氧浓度测量精度的影响。经过实验室测试,氧气传感器在(50~120)kPa范围内,补偿后的氧浓度(体积分数)测量误差小于FS2.0%。

In the field of coal mines,sudden changes in pressure will affect the measurement of oxygen concentration,and large deviations of the measured values or invalid data will appear.In this paper,through laboratory tests and simulation tests,the oxygen concentration values under different pressures are obtained,and the functional relationship between the oxygen concentration monitoring value and the pressure value is found.In order to eliminate the influence of pressure variation on the accuracy of oxygen concentration measurement,the sensor structure is studied,and a pressure adaptive compensation method is proposed.After laboratory testing,the error of oxygen concentration measurement after compensation is less than FS2.0%in the range of 50~120 kPa.