数显表面电阻测量仪测量误差的不确定度评定

The Evaluation of Uncertainty in Mearsurement Error of Digital Surface Resistance Tester

表面电阻测试仪是测试物体表面电阻值的一种仪器,多用于微电子、医药、航空航天、精密机械等领域,具有使用简单,携带方便等特点。本文介绍了表面电阻测量仪电阻误差和电压误差的不确定度评定方法,给出了实例。

The surface resistance tester is an instrument for measuring the surface resistance of an object,which is mainly used in microelectronics,medicine,aerospace,precision machinery and other fields.It is easy to use and carry.This paper introduces the uncertainty evaluation method of resistance error and voltage error of surface resistance measuring instrument,and gives the example.