基于Fabry-Perot光学干涉腔的真空计量装置研究进展

Research Progress of Vacuum Metrology Standard Based on Fabry-Perot Interference Cavities

随着国际单位制向量子化转变,基于光学方法的真空计量技术成为该领域的研究热点,最具代表性的是基于Fabry-Perot光学干涉腔的真空计量方法。介绍了该方法的测量原理,并对以美国NIST、瑞典Umeå和日本AIST等为代表的计量机构的研究进展进行了简要概述。介绍了本课题组研制的1台基于Fabry-Perot光学腔的真空计量装置的结构组成,给出了干涉腔精细度、温度稳定性和激光频率稳定性测试结果,表明,基于Fabry-Perot光学干涉腔的真空计量方法具有高灵敏度和可靠性,可有效促进我国真空计量技术向量子化转变,具有良好的应用前景。

With the quantized definition of the international unit system,the technology of vacuum gauge based on optical methods has become hotspots in this research filed.The measurement methods based on Fabry-Perot resonant cavities is one of most representive in these.The principle of it was show in this article and we introduced the research progress of NIST,Umeåand AIST briefly.Our research group construct a vacuum gauge device based on F-P interference cavities.The composition of it,fineness of interference cavities,stability of temperature in cavities and laser frequency was introduced in this essay.We can conclude that this methods has high sensitivity and reliability.And it could effectively promote the quantum transform of vacuum measurement in our nation and has capacious application prospect.