环形抛光盘几何参数对去除函数的影响

Influence of Geometric Parameters of Annular PolishingPad on Removal Function

为获得与理想去除函数更为接近的去除函数,采用中心开孔的环形抛光盘作为抛光工具,推导环形抛光盘在行星运动方式下的去除函数模型,探究环形抛光盘偏心率m及中心孔径r1对去除函数形状及误差修正能力的影响。研究表明:当0<m<0.6时,去除函数的中心区域出现较大程度的“凹陷”,不具备理想去除函数特性;中心开孔孔径r1主要影响去除函数的峰值区域大小及边缘去除量,随着r1增大,去除函数中心峰值区域越窄,边缘去除量减小,去除函数呈现出“脉冲特性”,有利于中频误差的修正;与应用较为广泛的圆形抛光盘去除函数相比,在相同偏心率m下,环形抛光盘的中频误差控制能力优于圆形抛光盘。

In order to obtain the removal function which is closer to the ideal removal function,using the annular polishing pad with a central hole as a polishing tool,the removal function model of the annular polishing pad under the planetary motion mode is deduced,and the influence of different eccentricity m and central aperture r1 on the shape and capability of error-correction of the removal functionexplored.The results show that when 0<m<0.6,there is a large degree of“depression”in the center area of the removal function,which does not have the features of ideal removal function;the central hole radius r1 mainly affects the peak area size and edge removal amount of the removal function in that,with the increase of r1,the central peak area of the removal function gets narrower and the edge removal amount gets less;and the removal function presents an impulsive feature,which is conducive to the correction of intermediate frequency error.The annular polishing disc has better medium frequency error control ability than that of the widely used round polishing disc under the same eccentricity m.