基于ZnO微型多功能传感器的制备及性能研究

Preparation and properties of ZnO-based multifunctional microsensor

以二乙基锌(DEZ)和水(H2O)为前驱体,采用原子层沉积方法在玻璃微球基底上沉积ZnO薄膜,得到核壳结构的ZnO包覆微球。以该微球为核心构筑传感器件,研究了器件的紫外、温度响应特性。由于ZnO固有的光电效应以及对O2的吸附和解吸作用,该器件显示出较为灵敏的紫外响应特性;由于ZnO独特的热释电效应,该器件能够灵敏地响应温度变化,电流变化率的灵敏度为7.80%/℃。进一步将其应用于人体呼吸的实时检测,实现了对不同人体热活动状态的区分与监测,可广泛应用于医疗和健康领域。

ZnO-coated microspheres with a core-shell structure is prepared through depositing ZnO thin film on glass microspheres matrix by atomic layer deposition(ALD)method using diethyl zinc(DEZ)and water as precursors.A multifunctional sensor device is made up of ZnO-coated microspheres and its UV/temperature sensing capabilities are characterized.This device shows a sensitive response property to UV because ZnO has intrinsic photoelectric effect,and the abilities to adsorb and desorb oxygen.Besides,this device can response sensitively to temperature changes due to the pyroelectric effect of Zn O,and its sensitivity is 7.80%/℃.Furthermore,this device can be applied in real-time breath monitoring of human body,realizing the monitoring of different human thermal activities,which can be widely used in medical and health fields.