特殊工作状态下热式气体质量流量计校准方法的研究

Study on the Calibration Method of Thermal Gas Mass Flowmeter for Special Working Conditions

本文主要研究进口压力和气体介质对热式气体质量流量计校准结果的影响。高压工作状态下,比较不同进口压力对校准结果的影响,优化了校准方法。特殊气体工作状态下,比较实际校准结果和理论换算结果,给出单组份氧气、单组份氩气、二氧化碳和氩气不同比例的混合气体等介质的流量修正系数表。

In this paper,the influence of inlet pressure and gas medium on the calibration results of thermal gas mass flowmeter is researched.Under high pressure operation,the influence of different inlet pressures on the calibration results was compared and the calibration method was optimized.Under the special gas working condition,the actual calibration results and the theoretical conversion results are compared,and the correction coefficient table of oxygen,argon,the mixture gas with different proportions of carbon dioxide and argon is given.