扫描探针显微镜轴向位移测量误差校准结果的不确定度评定

Evaluation of Uncertainty about Axial Displacement Measurement Error of Scanning Probe Microscopes

扫描探针显微镜主要应用于微电子技术、生物技术、信息技术和纳米技术等各种尖端科学领域,是纳米科技发展的共性关键技术,其位移测量精度是重要的计量参数,因而对其进行校准,保证其测量值准确可靠尤为重要。本文利用量值可溯源至中国计量科学研究院的二维纳米线间隔样板和纳米级台阶样板建立了扫描探针显微镜校准装置,实现对扫描探针显微镜X轴、Y轴、Z轴位移测量误差的校准,并对校准结果进行了不确定度评定。

Scanning probe microscope(SPM)is a common key technology in the development of nanotechnology.It is mainly used in microelectronics,biotechnology,information technology and nanotechnology.Its displacement measurement accuracy is an important measurement parameter,so it is particularly important to calibrate it to ensure the accuracy and reliability of its measurement value.In this paper,a calibration device for scanning probe microscope(SPM)is established by using the two-dimensional nanowire spacing and nanoscale step sample plates,which can be traced to the national institute of metrology.The displacement mesurement error of the X-axis,Y-axis and Z-axis of the scanning probe microscope is calibrated,and the uncertainty of the calibration results is evaluated.