改良西门子工艺物料平衡的计算与分析

Calculation and Analysis of MB in the Process of Modified Siemens Method

文章分析了改良西门子法制备多晶硅工艺所涉及的相关化学反应及转化率,在此基础上通过系统物料关系和物料守恒,建立了改良西门子工艺物料平衡的理论模型,重点讨论了SiHCl3还原多晶硅转化率、精馏SiHCl3和SiCl4的收率对物料平衡的影响。结果和方法可以为改良西门子法制备多晶硅工艺的设计和实际生产提供参考。

The related chemical reactions and conversion rates involved in the process of preparing polysilicon by modified Siemens method are analyzed.On this basis,through the system material relationship and material conservation,the improved Siemens process material balance theoretical model is established.The effects of SiHCl3 reduction polysilicon conversion rate,the yield of rectified SiHCl3 and SiCl4 on the material balance were mainly discussed.Results and methods can provide references for the design and actual production of the modified Siemens method.