低毒体系凝胶注模ITO靶材坯体的表面起皮现象与抑制研究

Oxygen Inhibition Study on Surface of ITO Green Body Prepared by Gel-casting with Low Toxicity System

针对凝胶注模成型ITO靶材坯体时出现的表面氧阻聚问题,研究了水溶性高分子PEG、PVP和PAM对ITO浆料、坯体性能及氧阻聚引起的起皮厚度的影响。结果表明:PEG的加入对ITO坯体起皮厚度基本没有影响,加入PVP和PAM均可在不同程度上改善坯体起皮状况,尤其当PAM加入量超过1.5%时,可完全消除氧阻聚引起的坯体表面起皮。

To study the surface oxygen inhibition of ITO green body prepared by gel-casting,the effects of water soluble polymers,PEG,PVP and PAM,on ITO sizing,property of the green body and the scaling thickness were researched.Results show that the addition of PEG almost has no effect on the thickness reduction,and that the oxygen inhibition can be improved by different degrees when PVP and PAM are added.When the addition of PAM is more than 1.5%,the oxygen inhibition can be completely eliminated.