Ka波段在线自检测MEMS微波功分器的设计与优化

Optimization and Design of Ka-Band Inline Self-Detection MEMS Microwave Power Divider

提出了一种基于MEMS技术,由MEMS微波功分器和在线式MEMS微波功率传感器组成的在线自检测MEMS微波功分器,实现了MEMS微波功分器在Ka波段的实时在线功率自检测。MEMS微波功分器为T型功率等分功分器,由共面波导、圆形的不对称共面带线和空气桥构成,三个端口处分别放置三个相同的在线式MEMS微波功率传感器用于端口处信号功率的实时监测。该结构基于GaAs MMIC工艺,它可以与GaAs微波电路实现单片集成。通过ADS和HFSS软件的协同仿真,在中心频率34 GHz处,回波损耗S11小于-30 dB,插入损耗S21(S31)约为-4.7 dB。在26 GHz^40 GHz的频率范围内,S11约小于-15 dB,隔离度S23小于-15 dB。

An inline self-detection MEMS(Micro-Electro-Mechanical Systems)microwave power divider is presented based on the MEMS technology. This self-detection divider consists of a MEMS microwave power divider and three inline-type MEMS microwave power sensors,which realizes the real-time inline power detection in the Ka-band. The MEMS microwave power divider is a T-type equalization power divider,which is composed of a coplanar waveguide,a circular asymmetric coplanar stripline and two air bridges. In order to monitor the signal power in real time,the three MEMS microwave power sensors are identical and placed at three ports of the divider,respectively. This structure has been fabricated by the GaAs MMIC(gallium arsenide monolithic microwave integrated circuit)process,which can be monolithically integrated with GaAs microwave circuits. Using the co-simulation of ADS and HFSS software,the return loss S11 is lower than-30 dB at the center frequency of 34 GHz while the insertion loss S21(S31)is about-4.7 dB. In the frequency range of 26 GHz^40 GHz,the S11 is lower than-15 dB while the isolation S23 is also lower than-15 dB.