基于LabVIEW的朗缪尔单探针数据处理系统

Data Processing System of Single Langmuir Probe Based on LabVIEW

朗缪尔单探针处理系统是使用单探针对符合麦克斯韦电子分布的等离子体放电进行测量诊断的基于LabVIEW运行的处理软件。该系统通过格拉布斯准则实现了对大误差数据的剔除。使用Savitzky-Golay滤波器对V-I曲线进行平滑处理,在将离子流排除后,对过渡区曲线进行处理与计算,得到等离子体放电相关参数。使用该套处理系统能够快捷准确地将繁杂的探针数据处理工作变得更为简单,为朗缪尔探针的实际应用提供了基础。使用该套探针处理系统处理了电子回旋共振波等离子体放电随功率变化的V-I曲线并得到准确的结果。

Single Langmuir probe processing system is a processing software based on LabVIEW,which uses a single probe to measure and diagnose the plasma discharge in accordance with the Maxwellian electron distribution.The system can eliminate the big error data through the Grubbs criterion.The Savitzky-Golay filter is used to smooth the V-I curve.The relevant parameters of plasma discharge are obtained by processing and calculating the curve of transition region after the ion current is removed.Using this system,we can make the complicated probe data processing work simple and accurate,which provides the practical application for Langmuir probe.The V-I curve of electron cyclotron wave resonance plasma discharge with power variation was processed by using this probe processing system and the accurate results were obtained.