纳米调制周期对CrWN/MoN纳米多层涂层结构和性能的影响

Influence of Nanometer Modulation Period on Structure and Properties of CrWN/MoN Nano-multilayer Coatings

目的研究纳米调制周期对CrWN/MoN纳米多层涂层结构及性能的影响。方法采用电磁永磁共控的阴极电弧离子镀技术,使用纯N2和合金CrW靶及纯金属Mo靶,制备不同调制周期厚度的CrWN/MoN纳米多层涂层,对CrWN/MoN纳米多层涂层的物相结构、微观形貌、硬度、摩擦系数和磨损率等进行分析。结果CrWN/MoN纳米多层涂层由面心立方CrWN与六方d-MoN两相组成。随着调制周期减小,CrWN/MoN纳米多层涂层衍射峰强度逐渐减弱,d-MoN(202)衍射峰消失,涂层表面的大颗粒数量减少,表面质量得到改善。随着调制周期由45 nm减小到13 nm,涂层的硬度由29.4 GPa逐渐减小到25.5 GPa,当调制周期为8nm时,CrWN/MoN纳米多层涂层硬度与弹性模量均达到最大值,分别为30.2 GPa和354.6 GPa。随着调制周期的减小,CrWN/MoN纳米多层涂层平均摩擦系数由0.45逐渐减小到0.29,磨损速率由4.2×10-7mm3/(N·m)逐渐减小到3.3×10-7mm3/(N·m)。结论调制周期对CrWN/MoN纳米多层涂层性能影响较大,调制周期厚度为8 nm时,CrWN/MoN纳米多层涂层的硬度最大,耐磨性能最好。

The work aims to study the influence of nanometer modulation period on structure and properties of CrWN/MoN nano-multilayer coatings.Nano-multilayer CrWN/MoN coatings with different modulation period were prepared by cathodic arc ion plating controlled by the permanent magnet with pure N2,alloy CrW target and pure metal Mo target.The microscale phase structure,morphology,hardness,friction coefficient and wear rate of the CrWN/MoN nano-multilayer coatings were systematically analyzed.The CrWN/MoN nano-multilayer coatings were composed of face-centered cubic CrWN and hexagonal d-Mo N.With the decrease of modulation period,the XRD diffraction peak of CrWN/MoN nano-multilayer coatings was gradually weakened,and the diffraction peak of d-MoN(202)disappeared.The number of larger particles on the surface of the CrWN/MoN nano-multilayer coatings decreased and the surface quality of the coating was improved.With the modulation period decreasing from 45 nm to 13 nm,the hardness of the CrWN/MoN coatings decreased from 29.4 GPa to 25.5 GPa.When the modulation period decreased to 8 nm,the hardness and elastic modulus of the CrWN/MoN nanometer multilayer coatings reached the maximum values,30.2 GPa and 354.6 GPa,respectively.With the decrease of modulation period,the average friction coefficient of CrWN/MoN nano-multilayer coatings gradually decreased from 0.45 to 0.29 and the wear rate decreased from 4.2×10-7 mm3/(N·m)to 3.3×10-7 mm3/(N·m).Thus,the modulation period has a great influence on the properties of CrWN/MoN nano-multilayer coatings.When the modulation period is 8 nm,the nano-multilayer CrWN/MoN coating has the highest hardness and the best wear resistance.