金刚线切割多晶硅片的高效制绒工艺研究

STUDY ON HIGH EFFICIENCY VELVET PROCESS OF DIAMOND WIRE CUT POLYCRYSTALLINE SILICON WAFER

随着多晶硅金刚线切片技术的普及,硅片酸制绒的难度越来越大,而得到最优的硅片表面微观绒面结构对提升多晶硅太阳电池转换效率起着尤为关键的作用。研究了基于引入多晶制绒添加剂后,调整不同制绒添加剂补液量及酸补液的配比浓度,利用电子天平、RC反射仪、SEM电镜扫描仪、WT-2000少子寿命测试仪等测试仪器测试制绒后硅片的减重、反射率、外观及微观形貌,调整后的新工艺可使多晶硅太阳电池的转换效率提升0.07%。

With the popularization of polycrystalline silicon diamond wire slicing technology,it is becoming more and more difficult to produce texturing of silicon wafer by acid etching process.The optimal micro-texture structure plays a critical role of improving the conversion efficiency of polycrystalline silicon solar cells.In this study,through adjusting the amount of additives and the supplement ratios of acid solution concentration,the weight loss of silicon wafer after texturing,reflectivity,appearance,and micro-morphology of the silicon wafers were measured by electronic balance,RC reflectometer,SEM scanner,WT-2000 minority carrier lifetime tester and other testing instruments.By adjusting processes,the conversion efficiency of the solar cell can be increased by 0.07%.