p型薄膜晶体管(TFT)的研究进展

Research Status of p-type Thin Film Transistor(TFT)

薄膜晶体管(TFT)作为平板显示领域的核心技术之一,在电子信息产业中发挥了重要作用。近年来,氧化物薄膜晶体管发展迅速,高迁移率、高可见光透过率以及低温加工工艺等优势使其在柔性显示领域占据重要地位。目前关于氧化物TFT的文章报道大部分是n型TFT,为进一步提高集成电路的性能,需要制造有稳定性能的p型TFT。文章对比了4种TFT器件结构的组成、工作原理以及其在显示器领域中的应用,重点阐述了自1997年起p型TFT的研究进展,包括其制备方法、制备原材料以及得到的TFT的相关性能等;最后详细介绍了制备p型TFT的半导体材料和其新型应用领域,表明p型TFT在显示领域中具有重要应用前景。

As one of the leading technology in the field of flat panel display,thin-film transistor(TFT)plays an important role in the electronic information industry.In recent years,oxide-based thin-film transistors have developed rapidly,the advantages of high mobility,high transmittance in visible light,and low-temperature fabrication processes make them important in the field of flexible displays.Most of the current reports on oxide TFTs are n-type TFTs,to further improve the performance of integrated circuits,it is necessary to manufacture p-type TFTs with stable performance.Based on the relevant theory of TFT,this paper discusses the four device structures,working principle and the major applications of TFT in the field of displays,then,through in-depth understanding of p-type TFT,the research progress of p-type TFT since 1997,including its preparation method,preparation raw materials,and related parameters of the obtained TFT,etc.,were reviewed;finally,the semiconductor materials for the preparation of p-type TFTs and their new application fields are also described in detail,indicating that p-type TFTs have made significant contributions in the field of display.