摘要
TiZrV non-evaporable getters have been widely used to improve vacuum properties in the field of accelerators due to the excellent activation temperature[1].The ultimate vacuum and pumping capacity of TiZrV film tubes at different activation temperatures were investigated in the experiment.The results show that the coated pipe is not activated at 180℃.The coated pipe is activated at 220℃and the ultimate vacuum is decreased by about 25%relative to the uncoated pipe,and the coated pipe enables a uniform pressure distribution therein.
