摘要
To establish the sputter ion pump remote control system for TR5 and TR6 of HIRFL(Heavy Ion Research Facility in Lanzhou),EPICS(Experimental Physics And Industrial Control System)is adopted to development new control system.Beckhoff PLC and self-designed hardware module have been used to build the hardware platform and the whole system structure is established based on field bus and EtherCAT(Ethernet for Control Automation Technology)technology.EtherCAT is an ideal Ethernet solution for industrial automation,characterized by outstanding performance and particularly simple handling.In the realization process of the system,IOC record device support and PV definition are achieved.At the same time,we have developed a client application in the CSS environment.In this sputter ion pump control system,we realized the basic interlocking protection function in both of hardware and software.The photo of hardware module is shown in Fig.1.The GUI interface is shown in Fig.2.The control system has being stably run since installed in Aug.2017.