三氯氢硅的安全生产

Safe Production of Trichlorosilane

三氯氢硅是生产多晶硅的主要原料,而高纯度的三氯氢硅是重要的硅外延片用电子特气,是制造电子元器件精密加工从而推动信息化和工业化深度融合的关键基础原材料。但三氯氢硅在空气中极易燃烧,其生产、检测、充装、仓储以及运输过程中都存在较大的安全风险。介绍了三氯氢硅的物性特点,从工艺设计、物料输送、生产管控、储存以及充装等方面进行全方位安全分析,并采取有效的防范措施和合理的建议,使安全风险降低到可控范围内,提升三氯氢硅的安全生产水平,确保三氯氢硅可以安全高效地应用于光伏及半导体行业。

Trichlorosilane is the main raw material for the production of polysilicon,and the high-purity trichlorosilane is an important electronic special gas for silicon epitaxial wafers,and it is the key basic raw material for the manufacturing of electronic components and precision processing to promote the in-depth integration of informatization and industrialization.However,trichlorosilane is extremely easy to burn in the air,and there are great safety risks in its production,detection,filling,storage and transportation.This paper introduces the chemical physical characteristics of silicon,hydrogen from technological design,materials,production control,storage and filling and so on omni-directional security analysis,and take effective preventive measures and reasonable Suggestions to make security risk is reduced to a manageable,raising the level of production safety in chemical hydrogen silicon,ensure the security of the chemical hydrogen silicon can be efficiently used light volt and semiconductor industries.