用于波前补偿的三液体透镜阵列的设计分析

Design and Analysis of Triple Liquid Lens Array for Wavefront Compensation

为了校正由活塞、倾斜和离焦而引起的波前误差,设计一种基于介电润湿效应的三液体透镜阵列。根据介电润湿的理论,构建介电润湿三液体透镜阵列模型,仿真模拟液体界面的面型随着电压的变化过程,并分析三液体透镜阵列对活塞误差、离焦误差和倾斜误差的波前补偿能力。仿真结果表明,三液体透镜阵列可以实现对不同类型波前误差的校正和补偿,峰谷值由补偿前的1.838λ减小到补偿后的0.285λ,方均根值由补偿前的0.424λ减小到补偿后的0.053λ,斯特列尔比由补偿前的0.161提高到补偿后的0.917。相关研究结果表明,三液体透镜阵列在无机械波前校正的领域中有着广阔的应用前景。

In this study,we designed a triple liquid lens array based on the electrowetting-on-dielectric effect to correct the wavefront errors caused by the piston,tilt,and defocus.A electrowetting-on-dielectric triple liquid lens array model is constructed herein according to the electrowetting-on-dielectric theory.The simulation of the surface shape of the liquid interface changes with the voltage.The wavefront compensation capability of the triple liquid lens array on the piston,defocus,and tilt errors are analyzed.The simulation results showed that the three-liquid lens array can realize the correction and the compensation of different types of wavefront errors.The peak-to-valley value is reduced from 1.838λbefore the compensation to 0.285λafter the compensation.The root mean square value is reduced from 0.424λbefore compensation to 0.053λafter the compensation.The Strehl ratio is 0.161 before the compensation to 0.917 after the compensation.The related research results show that the triple liquid lens array has broad application prospects in the field without mechanical wavefront correction.