逆向迭代离轴非球面检测方法

Method of Inverse Iteration Off-Axis Aspheric Surface Detection

离轴非球面广泛应用于现代光学系统中,一般需要特定的光学辅助元件对其进行检测,为此提出一种逆向迭代非零检测法。该方法可以不借助光学辅助元件,适用于检测同一类的离轴非球面。首先设计检测光路,并采用逆向迭代法去除非零误差。然后对系统误差、调整误差和随机误差等进行分析补偿以及各项误差的处理方法。最后通过仿真模拟,逆向迭代求解离轴非球面的面形方均根值为0.133λ,与仿真模拟的实际面形一致,仿真拟合的残差在10-5λ以内。逆向迭代非零检测法是针对离轴非球面一种高精度和通用型的非零检测方法。

Off-axis aspheric surfaces are widely used in modern optical systems and generally require specific auxiliary optical elements to be detected.Accordingly,this study proposes a reverse iterative non-zero detection method that can be used to detect the same type of off-axis aspheric surfaces without auxiliary optical elements.First,we design a detection optical path and established a reverse iteration method to eliminate non-zero errors.Next,we analyz and compensated the system,adjustment,and random errors,as well as their processing methods.Finally,through a simulation,we obtain the RMS value of the surface shape of the off-axis aspheric surface using reverse iteration as 0.133λ,which is consistent with the actual surface shape of the simulation.The residual error of the simulation fitting is within 10-5λ.In conclusion,the reverse iterative non-zero detection method is a high-precision and universal non-zero detection method for off-axis aspheric surfaces.