激光投影和四步移相法在微型元件测量中的应用与实现

Application and Realization of Laser Projection and Four-step Phase-shifting Method in Micro-component Measurement

采用微型激光投影技术产生干涉条纹,结合CCD传感器采集图像数据,通过整合四步相位移动测量方法,测量微小元件高度、面积和体积。针对不同的材质使用多波长激光干涉条纹,提高微小元件三维形貌测量的精度。通过Savitzky-Golay滤波器改善测量过程中的系统误差,对微小元件形貌测量可以达到微米级的分辨率。实验证明,激光投影和四步移相测量法在微型元件中平均测量误差可以达到±10μm,具有很高的实用价值。

In this paper,micro laser projection technology is used to generate interference fringe,combined with CCD sensor to collect image data.Area and volume of tiny components are measured by integrating the four-step phase-shifting measurement method.Multi-wavelength laser interference fringes are used for different materials to improve the accuracy of measuring the three-dimensional shape of small components.The Savitzky-Golay filter is used to improve the system error during the measurement process,and the micro-component topography measurement can achieve micron-level resolution.Experiments have proved that the average measurement error of laser projection and four-step phase-shifting measurement method can reach±10μm in micro-components,which has high practical value.