管式PECVD工艺对太阳电池镀膜颜色均匀性的影响研究

Study on the influence of tubular PECVD process on color uniformity of solar cell coating film

高效单晶PERC电池为当前太阳电池产业中主要的大规模扩张方向,其主要的生产流程包括制绒、磷扩散、掺杂、刻蚀、PECVD、丝网印刷、烧结等工序,其中PECVD工序负责光学减反射氮化硅薄膜的制备和表面钝化的重要任务,其对高效单晶PERC电池的外观和效率起到重要影响。本文通过设计改变管式PECVD工艺中的新旧卡点选用和石墨舟运行次数的参数,探索了影响镀膜颜色的均匀性的规律,得出了有利于改善镀膜颜色均匀性的结论。

Efficient single crystal PERC as the main direction of the large expansion of the solar cell industry,its main production process includes phosphorous diffusion,doping,etching,PECVD,screen printing and sintering process.Among them,the process of PECVD is responsible for the preparation of silicon nitride thin film of optical minus reflection and surface passivation,which has significant influence on the appearance and efficiency of efficient single crystal PERC.In this paper,the rules affecting the uniformity of coating color were explored by designing and changing the selection of new and old card points in tubular PECVD process and the parameters of running times of graphite boat.At the end,we draw a conclusion that the above mentioned method is beneficial to improve the uniformity of coating color.