硫系玻璃基底减反保护膜及其耐环境适应性的研究

Anti-Reflection Protective Film of Chalcogenide Glass Substrate and Its Environmental Adaptability

基于硫系玻璃IRG206(As40Se60)基底,研制了8~12μm波段的减反保护膜。该薄膜包含介质膜与类金刚石(DLC)保护膜两部分,可用于无热化红外探测系统窗口片中。研究了介质膜的破损机理,通过优化介质膜的沉积温度,提高了介质膜的附着力。研究了压强对DLC薄膜微观结构和应力的影响,通过将DLC薄膜拆分为低应力黏结层与高应力耐摩擦层,提升了薄膜耐摩擦性能与膜层牢固度,并降低了膜层应力。测试结果表明,减反保护膜在8~12μm波段的平均反射率为3.0%,且通过了GJB2485-1995标准测试中的盐雾测试、高低温测试和重摩擦测试,具有良好的耐环境适应性能。

Based on the chalcogenide glass IRG206 (As40Se60) substrates, we prepare the 8-12 μm anti-reflection protective films. This kind of film contains two parts: dielectric film and diamond-like carbon (DLC) protective film. It can be applied in the window lens of the non-thermalized infrared detection system. Moreover, the fracture mechanism of dielectric films is studied, and the deposition temperature of dielectric films is optimized to improve the adhesion of dielectric films. In addition, the effect of pressure on the microstructures and stress of DLC films is studied. By splitting the DLC film into the low-stress adhesive layer and the high-stress friction-resistant layer, the film stress is reduced, but the friction resistance as well as firmness of films are improved. The test results reveal that the average reflectivity of anti-reflection films at 8-12 μm is 3%. Furthermore, the anti-reflection films pass through the salt spray test, high and low temperature test, and severe abrasion test specified by GJB2485-1995, and possess good environmental adaptability.