WO3气敏传感材料及器件的研究进展

Research progress of WO3 gas sensing materials and devices

随着人类的发展与社会的进步,人们对身边的环境问题越来越重视,尤其是对有毒有害气体的检测,而金属氧化物气敏传感器就可以解决这一问题。金属氧化物半导体气体传感器由于小巧、成本低廉、使用便捷、响应迅速等特点而被广泛的研究与应用。三氧化钨(WO3)作为一种典型的n型半导体气敏材料,因其独特的气敏性能在检测各种有毒有害气体方面引起了广泛关注。传感材料的结构与形貌、暴露晶面、氧化物和贵金属的引入对改善材料的气敏性能起着关键性的作用。总结了近几年对一维,二维和三维WO3材料的合成、界面的调控和对其改性方法、气敏性能的研究及相关机理的分析,提出了目前基于WO3的气敏传感器研究过程中存在的问题,并对其未来发展趋势进行了展望。

With the development of human beings and the progress of society,people pay more and more attention to the environmental problems,especially the detection of toxic and harmful gases.Metal oxide gas sensors can solve this problem.Metal oxide semiconductor gas sensor has been widely studied and applied because of its small size,low cost,convenient use and quick response.Tungsten trioxide(WO3),as a typical n-type semiconductor gas sensing material,has attracted wide attention in the detection of various toxic and harmful gases due to its unique gas sensing properties.The structure and morphology of sensing materials,the exposed crystal facets,the introduction of oxides and noble metals play a key role in improving the gas sensing performance of materials.Therefore,in this paper,the recent studies on the synthesis,interface control,modification methods,gas sensing properties and related mechanisms of one-dimensional,two-dimensional and three-dimensional WO3 materials were summarized,the existing problems in the research process of gas sensor based on WO3 at present were put forward,and its future development trend was prospected.