微透镜阵列超精密加工实验教学探索

Experimental Teaching Exploration on Ultra-precision Machining of Micro Lens Arrays

微透镜阵列被广泛应用于军用及民用领域的许多新型光学系统中,其结构尺寸为微米级,加工精度要求高。为了培养机械类学生的工程实践能力及动手能力,基于广东省微纳加工技术与装备重点实验室研发的微结构微冲压机床,探讨了其工艺过程及原理,学生通过掌握微冲压机床的工作原理、加工技术,设计加工工件参数及实验方法,在模具钢上加工微米级的微透镜阵列,并用在位测量系统测量其加工精度。通过本实验有助于学生掌握机械领域的先进知识,锻炼学生的动手能力、设计能力。

Micro lens arrays are widely used in many new optical systems in military and civil fields.The dimensional accuracy is micron,hence,high processing accuracy is required.In order to cultivate the engineering practice ability and practical ability of mechanical students,based on the micro structure punching machine developed by Guangdong Provincial key laboratory of micro-nano manufacturing technology and equipment,the technological process and principle of the micro punching machine are discussed.By mastering the working principle and processing technology of the micro punching machine,the workpiece parameters and experimental method are designed,and the micron level micro lens array is machined on the mold steel by students.The machining accuracy of MLAs is measured by the on-site measurement system.Through this experiment,students can grasp the advanced knowledge in mechanical field,and exercise their practical ability and design ability.