电磁式MOEMS扫描光栅微镜驱动系统结构优化

Structural Optimization and Design of Driving System for Electromagnetic MOEMS Scanning Grating Mirror

基于现代农业发展对微型近红外光谱仪的迫切需求,对微型近红外光谱仪的电磁式MOEMS(Micro optical electronic mechanical system)扫描光栅微镜驱动系统进行结构优化改进,旨在解决MOEMS扫描光栅微镜驱动电压高、扫描角度小等问题。通过利用专业磁场仿真软件Maxwell 16.0对不同尺寸和材料属性永磁铁进行优化仿真,得到牌号分别为N38和N52的钕铁硼(NdFeB)作为电磁式MOEMS扫描光栅微镜的工作磁铁。在此基础上,设计制造2个相同尺寸的电磁式MOEMS扫描光栅微镜芯片A1和A2,并分别结合永磁铁N38和N52开展性能测试。测试结果表明:相比磁性较弱的N38,当电磁式MOEMS扫描光栅微镜芯片A1和A2在永磁铁N52的作用下达到最大机械扫描半角时,驱动电压分别降低6.6%和8.6%,最大机械扫描半角分别增大20.2%和17.4%;此外,通过对比分析机电性能测试结果可知,通过结合永磁铁N52,电磁式MOEMS扫描光栅微镜能够获得更优异的机械扫描性能。研究结果对于提升光谱仪的光谱检测范围以及检测精度具有实际应用价值。

Based on the urgent demand of modern agricultural development for micro near infrared(NIR)spectrometer,the experimental research on the core component of the NIR spectrometer was carried out.To overcome the problems of high driving voltage,small scanning angle,etc.,the structural optimization and improvement of driving system for the electromagnetic MOEMS scanning grating mirror was proposed.By using the professional simulation software Maxwell 16.0 to optimize the magnetic field of the permanent magnets with different sizes and material properties,the NdFeB with different grades of N38 and N52 was obtained as the working permanent magnets.On this basis,two electromagnetic MOEMS scanning grating mirrors marked A1 and A2 with the same size were designed and fabricated,which were used to combine with the two permanent magnets respectively for performance test.The test results showed that compared with the permanent magnet N38 with weak magnetism,when the two electromagnetic MOEMS scanning grating mirrors combined with N52 reached the maximum mechanical scanning half angle,the driving voltage was decreased by 6.6%and 8.6%,and the maximum mechanical scanning half angle was increased by 20.2%and 17.4%,respectively.Through the comparison and analysis of the mechanical and electrical performance test results,it can be concluded that the structural improvement of the driving system can effectively improve the performance of the MOEMS scanning grating mirror,and it had important practical application value for improving the spectral detection range and accuracy of the NIR spectrometer.