屏蔽装置在表面电阻测试仪校准工作中的效果浅析

The Effect of Shielding Device in Calibration of Surface Resistance Tester

文中主要阐述在屏蔽条件下与非屏蔽条件下,分别测量表面电阻测试仪的示值误差,通过数据之间比较分析,得到屏蔽装置在表面电阻测试仪的校准工作中的效果。

This article mainly analyzes the effect to shield from shielding device,when calibrating the Surface Resistance Tester.This effect manifests though contrasting and analyzing the differences of two pieces of data.The two pieces of data were acquired by measuring the indication error about Surface Resistance Tester separately under shielding and non-shielding conditions.So the effect of shielding device is verified.