MEMS陀螺阵列标定方法研究

Research of Calibration Method of MEMS Gyo Array

微机械电子系统(microelectro mechanical systems,MEMS)器件存在精确低、噪声大的缺点,而MEMS陀螺阵列的安装误差是影响陀螺输出精度的主要因素之一。为了提高陀螺阵列的精度,对陀螺阵列建立误差模型,并采用基于最小二乘法和静态权值分配法的标定方法对陀螺阵列进行标定,最终得出更加精确的陀螺阵列输出值。实现表明,采用上述标定方法,误差补偿后的陀螺阵列的性能有了显著的提高,精确度提高了一个数量级。

Micromechanical electronic system devices have the disadvantages of low accuracy and high noise,and the installation error of MEMS gyro array is one of the main factors affecting the output precision of gyro.In order to improve the accuracy of the gyro array,an error model is built for the gyro array.The gyro array output is obtained by calibrating the gyro array using a least squares calibration algorithm and assigning weights to each gyro based on the static mean square error of each gyro.The implementation shows that with the calibration method of this paper,the performance of the gyro array after error compensation has been significantly improved.