期刊文献+

压缩热效应对单晶硅密度测量的影响

Density Measurement of Monocrystalline Silicon Based on Compression Heat Effect
下载PDF
导出
摘要 为了探究压缩热效应对近单晶硅液体(DSL-2329)温度的影响,可采用理论推导与实验结果相结合的方式分析计算DSL-2329液体恒温压缩系数与恒熵压缩系数的比值,比值越大,则液体温度对压强越敏感。在0.1 mK的恒温液体测量环境中,通过对液体温度与所受压强的微量调节,实现单晶硅球特定的3种悬浮状态,这3种状态之间包括液体密度分别在恒温与恒熵条件下的变化过程,利用这3种特定悬浮状态之间的压强关系计算出液体等温压缩系数与等熵压缩系数的比值。实验数据表明,压强变化量越小,测得的恒熵压缩系数与液体恒温压缩系数的比值与理论值0.72越接近。 In order to explore the influence of compression heat effect on the temperature of DSL-2329 liquid,the ratio of constant temperature compression coefficient to constant entropy compression coefficient of DSL-2329 liquid can be calculated by combining theoretical deduction with experimental results.The higher the ratio,the more sensitive the temperature of liquid to pressure.In a constant temperature liquid measuring environment of(+0.1 mK),three specific suspension states of single crystal silicon sphere are realized by micro-adjustment of liquid temperature and pressure.The three states include the change of liquid density under constant temperature and constant entropy conditions respectively.The ratio of liquid isothermal compression coefficient to isentropic compression coefficient is calculated by using the pressure relationship between the three specific suspension states value.The experimental data show that the smaller the pressure change is,the closer the ratio of constant temperature compression coefficient to constant entropy compression coefficient is to the theoretical value of 0.72.
作者 钟家栋 孙斌 赵玉晓 马鑫钰 张竟月 张殿龙 ZHONG Jia-dong;SUN Bin;ZHAO Yu-xiao;MA Xin-yu;ZHANG Jing-yue;ZHANG Dian-long(China Jiliang University,Hangzhou,Zhejiang 310000,China;National Institute of Metrology,Beijing 100029,China)
出处 《计量学报》 CSCD 北大核心 2020年第12期1505-1509,共5页 Acta Metrologica Sinica
关键词 计量学 密度测量 静力悬浮法 单晶硅密度 压缩热效应 metrology density measurement static suspension method density of single crystal silicon compression heat effect
  • 相关文献

参考文献6

二级参考文献28

  • 1罗志勇,杨丽峰,陈允昌.基于多光束干涉原理的相移算法研究[J].物理学报,2005,54(7):3051-3057. 被引量:21
  • 2罗志勇,杨丽峰,陈允昌.标准硅球直径精密测量系统的设计[J].计量学报,2005,26(4):289-294. 被引量:12
  • 3顾英姿,陈朝晖,许常红,罗志勇.液体静力称量法液体密度测量及其不确定度评定[J].计量技术,2006(6):8-11. 被引量:19
  • 4Fujii K, Tanaka M, Nezu Y, et al. Determination of the Avogadro constant from accurate measurement of the molar volume of a silicon crystal[J]. Metrologia, 1999, 36: 455-464.
  • 5Fujii K, Waseda A, Tanaka M. Density measurements of silicon crystals by hydrostatic weighing[J]. IEEE Trans Instrum Meas, 2001, 50: 616-621.
  • 6Williams E R, Steiner R L, Newell D B. An Accurate Measurement of the Planck Constant[J]. Physical Review Letters, 1998, 81(12): 2404-2407
  • 7Newell D B, Steiner R L, Williams E R. The NIST Watt Balance: Recent Results and Future Plans[A]. 1999 Centennial Meeting Bulletin of Amer. Physical Soc Conf[C]. Atlanta, Ga: Abstract, Series Ⅱ, 1999, 44(1): Part 1, 178-179.
  • 8Lee K C. Rectification in Quantum Hall Effect Devices Above Breakdown[A]. 1999 Centennial Meeting Bulletin of Amer. Physical Soc Conf[C].Atlanta, Ga: Abstract, Series Ⅱ, 1999, 44(1): Part 1, 386.
  • 9K H Chang and Y J Lee.Hydrostatic weighing at KRISS.Metrologia,41 (2004),S95-S99
  • 10H Bettin and F Spieweck. Die Dichte des Wassers als Funktion der Temperatur nach Einftihrung der Internationalen Temperaturskala von 1990[ R]. PTBMitteilungen. 1990, 100 : 195 - 196.

共引文献56

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部