垂直腔面发射激光器研究进展

Research Progress of Vertical-cavity Surface-emitting Laser

垂直腔面发射激光器(Vertical-cavity surface-emitting laser,VCSEL)是40多年前被发明的,具有很多独特的优势,例如尺寸小、功耗低、效率高、寿命长、圆形光束以及二维面阵集成等。近年来,VCSEL市场发展迅速,在5G通信、光信息存储、3D传感、激光雷达、材料加工以及激光显示等领域被广泛应用。针对不同的应用需求,VCSEL的功率、速率、能效、高温性能以及波长的多样性等性能都有了长足的进步。本文首先介绍了VCSEL的研究历程和优点特性;综述了VCSEL在高功率、高速、高温下工作等方面的研究进展和应用现状;最后对VCSEL的最新应用做了介绍,展望了VCSEL的市场。

The vertical-cavity surface emitting laser(VCSEL)was invented 40 years ago,where a lot of unique features can be expected,such as small footprint,low power consumption,high efficiency,long lifetime,circular beam and two-dimensional arrangement and so on.In recent years,the market of VCSELs has been growing up rapidly,and VCSELs are now key devices in the fields of 5G communication,optical information storage,3D sensing,material processing,light detection and ranging(LiDAR),and laser display.For different application requirements,VCSEL has great achievements in the area of power,efficiency,speed and wavelength.In this paper,firstly,the research history and advantages of VCSEL are introduced;then,the research progress and application status of VCSEL at high power,high speed and high temperature are reviewed;lastly,the latest application of VCSEL is introduced,and the market of VCSEL is prospected.