化学气相沉积法制备高质量石墨烯方法研究与展望

Research and Prospect of High Quality Graphene Prepared by Chemical Vapor Deposition

石墨烯自发现以来因其杰出的理化性能广受关注,制备石墨烯的方法层出不穷。目前,采用化学气相沉积(CVD)技术实现了规模化制备高质量石墨烯。但石墨烯在制备过程中依然遇到了一些的瓶颈,如石墨烯产品污染、破损、皱褶,尤其是在高温条件下制备石墨烯成本较高等。根据近年来石墨烯制备技术和方案进行分析,总结整理近年来关于CVD制备高质量石墨烯的研究成果,并重点对当前基于非金属材料衬底生长石墨烯的方法进行讨论和前景预测。

Graphene has attracted much attention due to its outstanding physical and chemical properties since its discovery,and there are many methods to prepare graphene.At present,chemical vapor deposition(CVD)technology has been used to prepare highquality graphene on a large scale.However,there are still some bottlenecks in the preparation of graphene,such as pollution,damage and wrinkle of graphene products,especially the high cost of preparing graphene at high temperature.In this paper,based on the analysis of graphene preparation technology and scheme in recent years,the research results of high quality graphene prepared by CVD in recent years are summarized,and the current methods of graphene growth based on nonmetallic substrate are discussed and predicted.