平面干涉仪测立方体直角方法的研究

Research on the Method of Measuring Cube Right Angle by Plane Interferometer

为实现方体加工过程中快速准确的测角目的,解决传统测角技术难以适应大批量的方体加工问题,对平面干涉仪测立方体直角方法进行了研究。通过理论推导建立了待测角度偏差与干涉条纹条数的关系式,同时为在线加工过程角度的修正提供理论及检测方法的指导。通过对90 mm×90 mm×90 mm的立方体进行测角工艺探究,实现了用平面干涉仪对立方体直角误差的检测,以及误差正负的判断,结果表明当视场内条纹数m=5.5时,直角误差δ≤2″。条纹收缩时为正误差,条纹扩散时为负误差。

In order to realize the purpose of measuring angle quickly and accurately in the process of cube machining,and to solve the problem that traditional angle measuring technology cannot adapt the mass processing of cube,the method of measuring cube right angle by plane interferometer is studied in this paper. The relationship between the angle deviation to be measured and the number of interference stripes is established by theoretical derivation. At the same time,it provides the guidance of theory and detection method for the correction of on-line machining process angle. Through the 90 mm×90 mm×90 mm cube to explore the angle measurement process,the results show that when the number of fringes in the filed of view m≤5.5,the right angle error δ≤2″. When the retardation increases,it is a positive error when the fringe shrinks,while the fringe diffusion is a negative error. The measurement of cube right angle error by plane interferometer and the judgment of error positive and negative are realized.