白光干涉仪在金属材料表面测试中的应用研究

Application of White Light Interferometer in Metal Material Surface Tests

为了从微观角度分析材料服役损伤机理,快速准确地测量材料表面微观形貌,对白光干涉技术进行了理论分析,并采用白光干涉技术对磨斑、蚀坑两种不同类型的材料损伤形貌进行了具体的测试研究。测试结果表明,白光干涉仪可以准确地测量出磨斑、蚀坑的二维和三维形貌及深度分布数据。测得磨斑深度为45.68μm,腐蚀后的材料表面最大点蚀坑的深度为5.14μm。白光干涉仪适合于测试材料服役损伤后表面的三维形貌和数据。利用此技术可以对材料微观表面形貌进行快速精确的测量,对深入理解材料服役行为及寿命预测具有参考意义。

In order to analyze the damage mechanism of materials from the microscopic point of view,quickly and accurately measure the micro morphologies of the surface,the white light interference technology is analyzed theoretically.Two different types of material damage morphologies,such as wear spots and pits,are measured and studied by using white light interference technology.The results show that the white light interferometer can accurately measure the twodimensional and three-dimensional topographies and depth data of wear spots and pits.The depth of wear spot is 45.68μm,and the maximum pit depth is 5.14μm.The white light interferometer is suitable for testing the three-dimensional morphology and data of the damaged surface.The technology can be used to quickly and accurately measure the micro surface morphology of materials,which is of great significance for further understanding of behavior and life prediction of materials.