一种微纳多齿谐振光栅偏振分束器

A Micro-Nano Multi-Subparts Resonant Grating Polarization Beam Splitter

微纳光学器件是光路集成、片上光电转换和检测的重要基础器件。基于硅基微纳多齿谐振光栅,设计了一种高性能的微纳多齿谐振光栅偏振分束器(PBS)。应用光栅对于TE和TM偏振光表现出不同的衍射性质,从而实现偏振分束的目的。通过严格耦合波理论分析,研究了光栅PBS的性能。结果表明,在1.53~1.62μm(90 nm)的宽带光谱上,该PBS的衍射效率大于97%,消光比(ER)大于16dB,以及角度带宽为8°等的优越性能。此外,还研究了结构参数对光栅PBS性能的影响,数值分析表明,该装置具有良好的工艺容差,可广泛应用于通信系统的路由和交换设备。

Micro-nano optical devices are important basic components for optical path integration,on-chip photoelectric conversion and detection.Based on silicon-based micro-nano multi-subparts resonant grating,a highperformance polarization beam splitter(PBS)for micro-nano multi-subparts resonant grating is designed.Through grating layer,TE and TM polarized light show efficient reflection and transmission properties respectively,so as to achieve PBS.The properties of the grating PBS is investigated by rigorous coupled-wave analysis.It is shown that,over a broadband spectrum of 1.53μm^1.62μm(90 nm),the PBS demonstrates high diffraction efficiency(>97%)with extinction ratio(ER)greater than 16 dB and a comparatively wide angular bandwidth(about 8).In addition,the influence of the structure parameters on the performance of the grating PBS is also investigated.The numerical analysis shows that the device has good process tolerance and can be widely used in routing and switching devices of communication systems.