基于PLD溅射Al2O3薄膜的声表面波温度传感器的研究

Research on Surface Acoustic Wave Temperature Sensor Based on PLD Sputtering Al2O3 Thin Film

通过脉冲激光沉积系统沉积Al2O3薄膜层作为电极的防护层的声表面波温度传感器。在0~1300℃高温测试中,温度传感器的谐振频率随着温度的增加而减小。声表面波器件在1100℃环境下稳定工作了80 min,最后通过扫描电子显微镜(SEM)观察薄膜的表面形貌,原子力显微镜(AFM)对传感器进行表面粗糙测定、颗粒度解析。根据这些结果,提出了一种可以明显延长高温下声表面波器件的Pt电极的寿命的方法。

Al2O3 thin film is deposited by the pulsed laser deposition system as the protection layer of the electrode,and the surface acoustic wave temperature sensor.In the high temperature test from 0℃to 1300℃,the resonant frequency of the temperature sensor decreased with the increase of temperature and the surface acoustic wave device worked stably for 80 min at 1100℃.Finally,the surface morphology of the thin film was observed by scanning electron microscope(SEM),and the surface roughness and particle size analysis of the sensor were performed by atomic force microscope(AFM).Based on these results,a method that can significantly extend the life of Pt electrode of surface acoustic wave devices at high temperature was proposed.