高速运动平台的快速精密定位控制

Rapid and Precise Positioning Control of the High-speed Motion Stage

针对高速运动平台到位阶段的惯性振动造成的运动平台调节时间长、定位精度差等问题,提出了一种结合速度-加速度前馈控制、增益调度PID控制及扰动观测器(DOB)的复合控制方法。其中速度-加速度前馈用于实现平台的高加速运动特性;增益调度PID控制可以有效改善平台定位阶段由于非线性摩擦力对平台定位性能的影响,使平台的跟踪误差快速衰减到设定的定位精度范围内;扰动观测器用于对运动过程中的内外部扰动进行抑制。通过实验验证,该复合控制方法在保证定位精度的前提下可有效减小高速运动平台到位阶段的惯性振动,并且减小运动平台的调节时间,提高高速运动平台的定位性能。

Aiming at the problems of long settling time and poor positioning accuracy caused by the inertial vibration of the high-speed motion stage,a composite control method combining velocity-acceleration feedforward control,gain scheduled PID control and disturbance observer(DOB)is proposed.The speed-acceleration feedforward is used to achieve the highly accelerated movement characteristics of the stage.The disturbance observer is used to suppress the internal and external disturbances during the movement,and the PID control with physical deadband compensation can effectively improve the influence of the nonlinear friction force on the stage positioning performance.So that the tracking error can quickly attenuate to the set positioning accuracy range.It is verified by experiments that the composite control method can effectively reduce the inertial vibration and settling time of the motion stage and improve the positioning performance of the high-speed motion stage on the premise of ensuring the positioning accuracy.