基于迭代学习的直驱XY平台抗干扰复合控制

Anti-interference Compound Control of Direct Drive XY Platform Based on Iterative Learning

直驱XY平台在微电子封装领域有着广泛应用,针对扰动下难以实现XY平台高精密轨迹跟踪的问题,对双轴运动的轮廓误差模型以及抗扰控制机理进行研究,并提出了有效的控制方法。分析并建立了二维轨迹运动轮廓误差模型,在此基础上,单轴采用基于干扰观测器的双闭环前馈复合控制方式,轴间则利用迭代学习控制率构建基于轮廓误差的位置跟踪控制器进行协调控制。仿真结果表明,相比传统的PID控制,加入干扰观测器的双闭环前馈复合控制能实现更高的位置跟踪精度,且具有更好的抗干扰能力;经过1次迭代学习过程后,最大轮廓误差降低到2~3μm,充分满足高精度XY平台轨迹运动的要求。

Direct-drive XY platforms are widely used in the field of microelectronic packaging.Aiming at the problem that it is difficult to achieve high-precision trajectory tracking of XY platform under disturbance,the contour error model and anti-interference control mechanism of dual-axis motion are studied and an effective control method is proposed.Based on the analysis and establishment of the two-dimensional motion contour error model,a dual-loop controller with feedforward method and a disturbance observer is used for a single axis.In addition,iterative learning control rate is used to build a contour error-based position tracking controller for coordinated control between axes.Simulation result shows that compared with the traditional PID controller,a dual-loop controller with feedforward method and a disturbance observer can better reduce the influence of external interference with higher position tracking accuracy.After 1 iteration,the biggest contour error is reduced to 2~3μm,which fully meets the requirement of the trajectory movement of high-precision XY platform.