摘要
以高纯钛粉和钼粉为原料,在1 600℃温度和40 MPa的压力以及氩气保护下热压3 h,制备了5种不同成分的钼钛合金。研究了钛含量对钼钛合金力学性能和显微组织的影响。结果表明,Mo原子和Ti原子能够形成置换固溶体,且Mo-Ti合金在常温下具有脆性特征。随着钛原子分数从10%增加到50%,晶粒尺寸从7μm增加到15μm,致密度从95.8%提升至99.5%,洛氏硬度从22.3HRC增加到45.5HRC,抗弯强度从396 MPa增加到680 MPa。Mo-50%Ti(原子分数)的各方面性能最佳,这对后续钼钛合金靶材的制备及溅射性能研究具有一定意义。
Five kinds of Mo-Ti alloys with different composition were prepared with high purity titanium powder and molybdenum powder by hot pressing at 1 600 ℃ and 40 MPa for 3 h under the protection of Argon. Effects of titanium content on mechanical property and microstructure of the prepared Mo-Ti alloys were studied. Results obtained show that Mo and Ti atoms can form displacement solid solution,and Mo-Ti alloy is brittle at room temperature. With titanium content increasing from 10 atm.% to 50 atm.%,grain size increases from about 7 μm to 15 μm,relative density increases from 95.8% to 99.5%,rockwell hardness increases from 22.3 HRC to 45.5 HRC,and bending strength increases from 396 MPa to 680 MPa. Mo-50% Ti has the best performance in all aspects,which has a certain significance for the preparation of Mo-Ti alloy target and the study of sputtering performance.
作者
牛炫阳
张鹏飞
王广欣
NIU Xuanyang;ZHANG Pengfei;WANG Guangxin(School of Materials Science and Engineering,Henan University of Science and Technology,Luoyang 471023,China)
出处
《粉末冶金工业》
CAS
北大核心
2020年第6期45-49,共5页
Powder Metallurgy Industry
基金
国家科技重大专项(02专项)(2017ZX02408003)。
关键词
粉末冶金
热压
钼钛合金
powder metallurgy
hot pressing
molybdenum-titanium alloy