基于硅粉涂层技术的高效多晶硅锭研究

A study on high-efficient polysilicon ingot based on silicon powder coating technology

为降低多晶硅铸锭成本,需不断提高多晶硅锭质量和得材率。高效无籽晶全熔多晶硅锭具有较高得材率,但其质量偏差。基于全熔无籽晶铸锭技术,在喷涂氮化硅涂层的石英坩埚底部刷一层1~1.5 mm硅粉涂层作为多晶硅成核籽晶制备多晶硅铸锭。实验结果表明,硅粉成核晶粒细小且均匀性较好,位错密度较小,硅锭底部红区较短,电池平均转换效率比半熔有籽晶高效多晶硅锭制作的电池平均转换效率低0.03%。

In order to reduce the cost of polysilicon ingotting,it is necessary to improve the quality and yield of polysilicon ingots.The high-efficient seedless full-melting polysilicon ingot has higher yield,but its quality is worse.Based on the technology of full-melting seedless ingotting,polysilicon ingots were prepared by brushing a layer of 1 to 1.5 mm silicon powder coating on the bottom of quartz crucible sprayed with silicon nitride coating as polysilicon nucleation seeds.The experimental results show that the nucleation grain of silicon powder is fine and uniform,the dislocation density is small,the red zone at the bottom of silicon ingot is short,and the average conversion efficiency of the battery is 0.03% lower than that of the battery made of semi-fused seed high-efficient polysilicon ingots.