α型籽晶对氧化铝基薄膜低温生长及力学性能的影响

Influence ofα-type Seeds on the Low-Temperature Growth and Me-chanical Property of the Alumina-based Films

采用Al+α-Al2O3复合材料及Al100-xCrx(x=10,20,30)合金作为靶材,用反应磁控溅射将α型籽晶引入氧化铝基薄膜中,研究了籽晶对氧化铝基薄膜的元素比例、相组成、结构特征、表面形貌及纳米硬度的影响.结果显示,在550℃时溅射Al+α-Al2O3复合靶所得的薄膜由单相的α-Al2O3组成,而在同一温度下采用Al70Cr30合金靶所制得的薄膜中检测到α-(Al0.7Cr0.3)2O3固溶体.纯α-Al2O3薄膜及α-(Al0.7Cr0.3)2O3固溶体薄膜的纳米硬度分别达到~23.5GPa和~28.5GPa.

In this work,all depositions have been carried out in a reactive magnetron sputtering system and the Al+α-Al2 O3 composite and Al100-xCrx(x=10,20,30) alloy have been sputtered as targets to introduce theα-type seeds.The influence of the seeds on the elemental composition,phase constitution,microstructure,morphology and nano-hardness of the alumina-based films have been investigated via several techniques.The alumina film deposited from Al+α-Al2 O3 composite target at 550℃ is composed of single-phase α-Al2 O3.The Al-Cr-O film prepared with the Al70Cr30 target at the same temperature is identified as α-(Al0.7Cr0.3)2 O3 solid solution.The nano-hardness of the α-Al2 O3 film was measured as ~23.5 GPa and that of the α-(Al0.7Cr0.3)2 O3 films was calculated as~28.5 GPa.