高纯气体流量测量中的仪表选型

Instrument Type Selection for High Purity Gas Flow Measurement

高纯气体具有组分稳定,无尘、无水滴、无油污的特点,为流量测量和流量计的稳定运行创造了良好的条件。通过对比差压式流量计和热式质量流量计的工作原理及在高纯气体实际测量中的应用,介绍了选用两种流量计的条件,分析了差压式流量计和热式质量流量计在实际测量中存在的误差原因,并给出了相应解决方案。

The high purity gas is of the characteristics of stable component, no dust, no water-drop and no oil pollution. It creates good condition for flow measurement and stable running for flowmeter. Through comparison of the working principle for differential pressure flowmeter and thermal mass flowmeter, and the application of practical measurement for high purity gas, the conditions for the selection of these two kinds of flowmeter are introduced, and the error cause existing in the actual application for the differential pressure flowmeter and thermal mass flowmeter is investigated, relevant solution is proposed.